POLISHING APPARATUS AND POLISHING METHOD - Patent 1830985

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EP 1 830 985 A2

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(88)	Date of publication A3:
	03.08.2006

(43)	Date of publication:
	12.09.2007 Bulletin 2007/37

(21)	Application number: 05806653.1

(22)	Date of filing: 15.11.2005

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International Patent Classification (IPC):

B24B 37/04^(2006.01)

B24B 57/02^(2006.01)

(86)	International application number:
	PCT/JP2005/021314

(87)	International publication number:
	WO 2006/054732 (26.05.2006 Gazette 2006/21)

(84)	Designated Contracting States:
	DE FR

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Priority:

18.11.2004 JP 2004334548

(71)	Applicant: EBARA CORPORATION
	Ohta-ku, Tokyo 144-8510 (JP)

(72)	Inventors:
	KOHAMA, Tatsuya, c/o Ebara Corporation Tokyo, 1448510 (JP) KOBATA, Itsuki, c/o Ebara Corporation Tokyo, 1448510 (JP) NOMURA, Toshikazu, c/o Ebara Corporation Tokyo, 1448510 (JP)

(74)	Representative: Wagner, Karl H.
	Wagner & Geyer Gewürzmühlstrasse 5 80538 München 80538 München (DE)

(54)	POLISHING APPARATUS AND POLISHING METHOD