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(11)

EP 1 831 430 A2

(12)

(43) Date of publication: 12.09.2007 Bulletin 2007/37 (21) Application number: 05854872.8 (22) Date of filing: 20.12.2005

(51) International Patent Classification (IPC):  C23F 1/00(2006.01) H01L 21/306(2006.01) (86) International application number: PCT/US2005/046226 (87) International publication number: WO 2006/069085 (29.06.2006 Gazette 2006/26)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR Designated Extension States: AL BA HR MK YU (30) Priority: 21.12.2004 US 637897 P 24.05.2005 US 137200 03.11.2005 US 266167 (71) Applicant: Applied Materials, Inc. Santa Clara, CA 95054 (US)

(72) Inventors: KAO, Chien-Teh Sunnyvale, CA 94086 (US) CHOU, Jing-Pei (Connie) Sunnyvale, CA 94087 (US) UMOTOY, Salvador P. Antioch, CA 94509 (US) CHANG, Mei Saratoga, CA 95070 (US) YUAN, Xiaoxiong (John) Cupertino, CA 95014 (US) CHANG, Yu San Jose, CA 95129 (US) LU, Xinliang Sunnyvale, CA 94086 (US) PHAN, See-Eng San Jose, CA 95129 (US) KUANG, William Sunnyvale, CA 94086 (US) TZU, Gwo-Chuan Sunnyvale, CA 94086 (US) OR, David T. San Jose, CA 95117 (US) (74) Representative: Bayliss, Geoffrey Cyril  BOULT WADE TENNANT, Verulam Gardens 70 Gray's Inn Road London WC1X 8BT London WC1X 8BT (GB)