(84) |
Designated Contracting States: |
|
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE
SI SK TR |
(30) |
Priority: |
30.11.2004 JP 2004345400 04.11.2005 US 267026 24.11.2005 JP 2005338457
|
(71) |
Applicant: TOKYO ELECTRON LIMITED |
|
Minato-ku,
Tokyo 107-8481 (JP) |
|
(72) |
Inventors: |
|
- MURAKAMI, Kazuaki,
/o Kyushu University
Kasuga-shi,
Fukuoka 816-8580 (JP)
- SHUTO, Makoto,
c/o Inst. Syst. & Info. Tech.
Sawara-ku,
Fukuoka-shi,
Fukuoka 814-0001 (JP)
- GAUTHIER, Lovic,
c/o Fukuoka Ind., Sci. & Tech.
Chuo-ku,
Fukuoka-shi,
Fukuola 810-0001 (JP)
- MATSUO, Takuma,
c/o Inst. Syst. & Info. Tech.
Sawara-ku,
Fukuoka-shi,
Fukuoka 814-0001 (JP)
- HASEBE, Tetsuya,
c/o Tokyo Electron Limited
Tokyo 107-8481 (JP)
- KIKUCHI, Shuichi,
c/o Tokyo Electron Device Ltd
Yokohama-shi,
Kanagawa 224-0045 (JP)
|
(74) |
Representative: Liesegang, Eva |
|
Forrester & Boehmert,
Pettenkoferstrasse 20-22 80336 München 80336 München (DE) |
|