| (84) |
Designated Contracting States: |
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DE FR GB IE |
| (30) |
Priority: |
22.12.2004 US 639109 P
22.04.2005 US 112281
22.04.2005 US 112932
|
| (71) |
Applicants: |
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- Applied Materials, Inc.
Santa Clara, CA 95054 (US)
- Sokudo Co., Ltd.
Kyoto 600-8009 (JP)
|
|
| (72) |
Inventors: |
|
- ISHIKAWA, Tetsuya
Saratoga, CA 95070 (US)
- ROBERTS, Rick, J.
San Jose, CA 95128 (US)
- ARMER, Helen, R.
Cupertino, CA 95014 (US)
- VOLFOVSKI, Leon
Mountain View, CA 94043 (US)
- PINSON, Jay, D.
San Jose, CA 95120 (US)
- RICE, Michael
Pleasanton, CA 94566 (US)
- QUACH, David, H.
San Jose, CA 95120 (US)
- SALEK, Mohsen, S.
Saratoga, CA 95070 (US)
- LOWRANCE, Robert
Los Gatos, CA 95032 (US)
- BACKER, John, A.
San Jose, CA 95127 (US)
- WEAVER, William, Tyler
Austin, TX 78704 (US)
- CARLSON, Charles
Cedar Park, TX 78613 (US)
- WANG, Chongyang
San Jose, CA 95148 (US)
- HUDGENS, Jeffrey
San Francisco, CA 95127 (US)
- HERCHEN, Harald
Los Altos, CA 94024 (US)
- LUE, Brian
Mountain View, CA 94041 (US)
|
| (74) |
Representative: Zimmermann, Gerd Heinrich et al |
|
Zimmermann & Partner,
P.O. Box 330 920
80069 München
80069 München (DE) |
|
