(19)

(11)

EP 1 842 227 A2

(12)

(88) Date of publication A3: 11.01.2007 (43) Date of publication: 10.10.2007 Bulletin 2007/41 (21) Application number: 06717944.0 (22) Date of filing: 11.01.2006

(51) International Patent Classification (IPC):  H01L 21/203(2006.01) B81C 1/00(2006.01) B81B 1/00(2006.01) C30B 25/02(2006.01) (86) International application number: PCT/US2006/000808 (87) International publication number: WO 2006/076354 (20.07.2006 Gazette 2006/29)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR (30) Priority: 11.01.2005 US 643390 P 11.02.2005 US 56338 11.07.2005 US 178623 (71) Applicants: Apollo Diamond, Inc. Framingham, MA 01704 (US) Linares, Robert C. Sherborn, Massachusetts 01770 (US) Doering, Patrick J. Holliston, Massachusetts 01746 (US) Linares, Bryant Sherborn, Massachusetts 01770 (US) Genis, Alfred R. East Douglas, Massachusetts 01516 (US) Dromeshauser, William W. Norwell, Massachusetts 01516 (US) Murray, Michael Mountain View, CA 94040 (US) Abrahams, John M. Scarsdale, NY 10583 (US) Novak, Alicia E. Denver, CO 80224 (US)

(72) Inventors: Apollo Diamond, Inc. Framingham, MA 01704 (US) Linares, Robert C. Sherborn, Massachusetts 01770 (US) Doering, Patrick J. Holliston, Massachusetts 01746 (US) Linares, Bryant Sherborn, Massachusetts 01770 (US) Genis, Alfred R. East Douglas, Massachusetts 01516 (US) Dromeshauser, William W. Norwell, Massachusetts 01516 (US) Murray, Michael Mountain View, CA 94040 (US) Abrahams, John M. Scarsdale, NY 10583 (US) Novak, Alicia E. Denver, CO 80224 (US) (74) Representative: Bergquist, Kjell Gunnar  Albihns Göteborg AB, Box 142 401 22 Göteborg 401 22 Göteborg (SE)