(19)

(11)

EP 1 842 239 A2

(12)

(43) Date of publication: 10.10.2007 Bulletin 2007/41 (21) Application number: 06718789.8 (22) Date of filing: 19.01.2006

(51) International Patent Classification (IPC):  H01L 29/78(2006.01) H01L 21/8238(2006.01) (86) International application number: PCT/US2006/001768 (87) International publication number: WO 2006/078740 (27.07.2006 Gazette 2006/30)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR Designated Extension States: AL BA HR MK YU (30) Priority: 19.01.2005 US 905745 (71) Applicant: International Business Machines Corporation Armonk, New York 10504 (US)	(72) Inventors: CHEN, Xiangdong Poughquag, New York 12570 (US) YANG, Haining, S. Wappingers Falls, New York 12590 (US) (74) Representative: Williams, Julian David  IBM United Kingdom Limited Intellectual Property Law Hursley Park Winchester Hampshire SO21 2JN Winchester Hampshire SO21 2JN (GB)