(19)
(11) EP 1 845 132 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
01.04.2009 Bulletin 2009/14

(45) Mention of the grant of the patent:
21.01.2009 Bulletin 2009/04

(21) Application number: 07251304.7

(22) Date of filing: 27.03.2007
(51) International Patent Classification (IPC): 
C08L 83/04(2006.01)
B32B 9/04(2006.01)
 C09D 183/04(2006.01)
G03F 7/09(2006.01)

(54)

Silicon-containing film-forming composition, silicon-containing film, silicon-containing film-bearing substrate, and patterning method

Siliziumhaltige, folienbildende Zusammensetzung, siliziumhaltige Folie, siliziumhaltiges, folientragendes Substrat und Strukturierungsverfahren

Composition de formation d'un film contenant du silicone, film contenant du silicone, substrat porteur de film contenant du silicone et procédé de placement de motif

(84) Designated Contracting States:
DE

(30) Priority: 11.04.2006 JP 2006108302

(43) Date of publication of application:
17.10.2007 Bulletin 2007/42

(73) Proprietor: Shin-Etsu Chemical Co., Ltd.
Chiyoda-ku, Tokyo (JP)

(72) Inventors:
  • Ogihara, Tsutomu c/o New Functional Materials Res. Ctr.
    Jeotsu-shi, Niigata-ken (JP)
  • Ueda, Takafumi c/o New Functional Materials Research Ctr.
    Joetsu-shi Niigata-ken (JP)
  • Iwabuchi, Motoaki c/o New Functional Materials Res. Ctr.
    Jeotsu-shi, Niigata-ken (JP)

(74) Representative: Stoner, Gerard Patrick et al
Mewburn Ellis LLP 33 Gutter Lane
London EC2V 8AS
London EC2V 8AS (GB)


(56) References cited: : 
EP-A- 1 788 433
US-A1- 2004 247 900
 EP-A- 1 788 437
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).