ETCHANT TREATMENT PROCESSES FOR SUBSTRATE SURFACES AND CHAMBER SURFACES - Patent 1848550

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EP 1 848 550 A2

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(88)	Date of publication A3:
	18.01.2007

(43)	Date of publication:
	31.10.2007 Bulletin 2007/44

(21)	Application number: 06719625.3

(22)	Date of filing: 27.01.2006

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International Patent Classification (IPC):

B08B 6/00^(2006.01)
C25F 3/30^(2006.01)

C25F 1/00^(2006.01)

(86)	International application number:
	PCT/US2006/002841

(87)	International publication number:
	WO 2006/083693 (10.08.2006 Gazette 2006/32)

(84)	Designated Contracting States:
	DE

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Priority:

31.01.2005 US 47323
03.10.2005 US 242613

(71)	Applicant: Applied Materials, Inc.
	Santa Clara, CA 95054 (US)

(72)	Inventors:
	SAMOILOV, Arkadii, V. Sunnyvale, CA 94087 (US) ZOJAJI, Ali Santa Clara, CA 95051 (US)

(74)	Representative: Zimmermann, Gerd Heinrich et al
	Zimmermann & Partner, P.O. Box 330 920 80069 München 80069 München (DE)

(54)	ETCHANT TREATMENT PROCESSES FOR SUBSTRATE SURFACES AND CHAMBER SURFACES