(19)
(11) EP 1 848 569 A1

(12)

(43) Date of publication:
31.10.2007 Bulletin 2007/44

(21) Application number: 06735719.4

(22) Date of filing: 21.02.2006
(51) International Patent Classification (IPC): 
B24D 18/00(2006.01)
B24B 37/04(2006.01)
B24D 13/14(2006.01)
(86) International application number:
PCT/US2006/006176
(87) International publication number:
WO 2006/089293 (24.08.2006 Gazette 2006/34)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

(30) Priority: 15.07.2005 WO PCT/US2005/025330
18.02.2005 US 60898
14.10.2005 US 251547
18.02.2005 US 654104 P
18.02.2005 US 654173 P
02.05.2005 US 677062 P

(71) Applicant: Neopad Technologies Corporation
Sunnyvale, CA 94085 (US)

(72) Inventors:
  • ROY, Pradip, K.
    Orlando, FL 32819 (US)
  • DEOPURA, Manish
    Sunnyvale, California 94085 (US)
  • MISRA, Sudhanshu
    San Jose, CA 95138 (US)

(74) Representative: Price, Nigel John King 
J.A. KEMP & CO. 14 South Square Gray's Inn
London WC1R 5JJ
London WC1R 5JJ (GB)

   


(54) CUSTOMIZED POLISHING PADS FOR CMP AND METHODS OF FABRICATION AND USE THEREOF