| (84) |
Designated Contracting States: |
|
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE
SI SK TR |
|
Designated Extension States: |
|
AL BA HR MK YU |
| (30) |
Priority: |
31.01.2005 US 648747 P
31.01.2005 US 648951 P
31.01.2005 US 648952 P
|
| (71) |
Applicant: Cascade Microtech, Inc. |
|
Beaverton, OR 97006 (US) |
|
| (72) |
Inventors: |
|
- ANDREWS, Peter
Beaverton, Oregon 97007 (US)
- HESS, David
Beaverton, Oregon 97006 (US)
- NEW, Robert
Portland, Oregon 97225 (US)
|
| (74) |
Representative: Beyer, Andreas et al |
|
Wuesthoff & Wuesthoff
Patent- und Rechtsanwälte
Schweigerstrasse 2
81541 München
81541 München (DE) |
|
