(19)
(11) EP 1 849 188 A1

(12)

(43) Date of publication:
31.10.2007 Bulletin 2007/44

(21) Application number: 06703617.8

(22) Date of filing: 24.01.2006
(51) International Patent Classification (IPC): 
H01L 27/115(2006.01)
(86) International application number:
PCT/KR2006/000257
(87) International publication number:
WO 2006/085718 (17.08.2006 Gazette 2006/33)
(84) Designated Contracting States:
DE FR IT

(30) Priority: 14.02.2005 KR 20050011803

(71) Applicant: Excel Semiconductor Inc.,
Seongnam-si, Gyeonggi-do 462-807 (KR)

(72) Inventors:
  • Jang, Yoon Soo, 909-604, Yongin-suji
    Yongin-si, Gyeonggi-do 462-170 (KR)
  • Park, Kwang
    Seocho-gu, Seoul 137-060 (KR)
  • Song, Bok Nam
    Seongnam-si, Gyeonggi-do 463-901 (KR)
  • Choi, Seounk Ouk, Ga-103, KyungNam Villa
    Anyang-si, Gyeonggi-do 431070 (KR)
  • Kim, Han Heung
    Bucheon-si, Gyeonggi-do 420-020 (KR)

(74) Representative: Neobard, William John et al
Kilburn & Strode 20 Red Lion Street
London WC1R 4PJ
London WC1R 4PJ (GB)

   


(54) FLASH MEMORY CELL HAVING BURIED FLOATING GATE STRUCTURE AND METHOD OF MANUFACTURING THE SAME