(19)
(11) EP 1 851 784 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
19.10.2016 Bulletin 2016/42

(45) Mention of the grant of the patent:
29.06.2016 Bulletin 2016/26

(21) Application number: 06704691.2

(22) Date of filing: 09.02.2006
(51) International Patent Classification (IPC): 
H01J 37/317(2006.01)
(86) International application number:
PCT/AT2006/000049
(87) International publication number:
WO 2006/084298 (17.08.2006 Gazette 2006/33)

(54)

CHARGED-PARTICLE EXPOSURE APPARATUS WITH ELECTROSTATIC ZONE PLATE

VORRICHTUNG ZUR BELICHTUNG MIT GELADENEN TEILCHEN MIT ELEKTROSTATISCHER ZONENPLATTE

APPAREIL D'EXPOSITION A PARTICULES CHARGEES COMPRENANT UNE PLAQUE A ZONE ELECTROSTATIQUE

(84) Designated Contracting States:
DE NL

(30) Priority: 11.02.2005 AT 2302005

(43) Date of publication of application:
07.11.2007 Bulletin 2007/45

(73) Proprietor: IMS Nanofabrication AG
1020 Wien (AT)

(72) Inventors:
  • PLATZGUMMER, Elmar
    A-1090 Wien (AT)
  • CERNUSCA, Stefan
    3052 Innermanzing (AT)

(74) Representative: Patentanwaltskanzlei Matschnig & Forsthuber OG 
Biberstraße 22 Postfach 36
1010 Wien
1010 Wien (AT)


(56) References cited: : 
EP-A- 1 139 384
WO-A2-2004/038509
US-A1- 2003 209 676
 EP-A- 1 253 619
US-A1- 2003 155 534
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).