(19)

(11)

EP 1 853 406 A1

(12)

(43) Date of publication: 14.11.2007 Bulletin 2007/46 (21) Application number: 06712121.0 (22) Date of filing: 16.01.2006

(51) International Patent Classification (IPC):  B24B 37/04(2006.01) B24B 49/16(2006.01) (86) International application number: PCT/JP2006/300903 (87) International publication number: WO 2006/077994 (27.07.2006 Gazette 2006/30)

(84) Designated Contracting States: DE FR (30) Priority: 21.01.2005 JP 2005014013 (71) Applicant: EBARA CORPORATION Ohta-ku, Tokyo 144-8510 (JP)	(72) Inventors: SASAKI, Tatsuya a-ku, Tokyo, 1448510 (JP) KAMIOKA, Shintaro a-ku, Tokyo, 1448510 (JP) (74) Representative: Geyer, Ulrich F. et al WAGNER & GEYER, Patentanwälte, Gewürzmühlstrasse 5 80538 München 80538 München (DE)