| (84) |
Designated Contracting States: |
|
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE
SI SK TR |
|
Designated Extension States: |
|
AL BA HR MK YU |
| (30) |
Priority: |
27.01.2005 US 648004 P
08.09.2005 US 715024 P
15.09.2005 US 228425
15.09.2005 US 228649
|
| (71) |
Applicant: Applied Materials, Inc. |
|
Santa Clara, CA 95054 (US) |
|
| (72) |
Inventor: |
|
- WEIDMAN, Timothy W.
Sunnyvale, CA 94086 (US)
|
| (74) |
Representative: Zimmermann, Gerd Heinrich et al |
|
Zimmermann & Partner,
P.O. Box 330 920
80069 München
80069 München (DE) |
|
