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(11)

EP 1 853 750 A2

(12)

(88) Date of publication A3: 18.01.2007 (43) Date of publication: 14.11.2007 Bulletin 2007/46 (21) Application number: 05851693.1 (22) Date of filing: 14.11.2005

(51) International Patent Classification (IPC):  C23C 22/05(2006.01) C23C 22/06(2006.01) C23C 22/12(2006.01) C23C 22/34(2006.01) C23C 22/44(2006.01) C23C 22/56(2006.01) C23C 22/00(2006.01) C23C 22/30(2006.01) (86) International application number: PCT/US2005/041425 (87) International publication number: WO 2006/088520 (24.08.2006 Gazette 2006/34)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR (30) Priority: 15.02.2005 US 58533 (71) Applicant: The United States of America as Represented by The Secretary of The Navy Patuxent River, MD 20670-1550 (US)	(72) Inventors: MATZDORF, Craig, A. California, Maryland 20619 (US) NICKERSON, William, C., Jr. Patuxent River, Maryland 20670 (US) BECK, Erin, N. Patuxent River, Maryland 20670 (US) (74) Representative: Killin, Stephen James et al Venner, Shipley LLP 20 Little Britain GB-London EC1A 7DH GB-London EC1A 7DH (GB)