(19)

(11)

EP 1 854 121 A1

(12)

(43) Date of publication: 14.11.2007 Bulletin 2007/46 (21) Application number: 06720828.0 (22) Date of filing: 17.02.2006

(51) International Patent Classification (IPC):  H01J 35/20(2006.01) G21K 5/10(2006.01) (86) International application number: PCT/US2006/005541 (87) International publication number: WO 2006/093687 (08.09.2006 Gazette 2006/36)

(84) Designated Contracting States: DE FR NL (30) Priority: 25.02.2005 US 67124 23.03.2005 US 88475 (71) Applicant: Cymer, Inc. San Diego, CA 92127-2413 (US)	(72) Inventors: ALGOTS, John, Martin San Diego, California 92131 (US) HEMBERG, Oscar La Jolla, California 92037 (US) CHUNG, Tae, H. San Diego, California 92128 (US) (74) Representative: Schuster, Thomas  Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät Maximilianstrasse 58 80538 München 80538 München (DE)