(19)

(11)

EP 1 856 719 A2

(12)

(88) Date of publication A3: 30.11.2006 (43) Date of publication: 21.11.2007 Bulletin 2007/47 (21) Application number: 06719507.3 (22) Date of filing: 26.01.2006

(51) International Patent Classification (IPC):  H01L 21/04(2006.01) H01L 29/872(2006.01) H01L 29/16(2006.01) (86) International application number: PCT/US2006/002669 (87) International publication number: WO 2006/081304 (03.08.2006 Gazette 2006/31)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR (30) Priority: 26.01.2005 US 43684 (71) Applicant: Apollo Diamond, Inc. Framingham, MA 01704 (US)	(72) Inventor: LINARES, Robert Sherborn, MA 01770 (US) (74) Representative: Bengtsson, Peggy Katrin  Albihns Malmo AB P.O. Box 4289 203 14 Malmö 203 14 Malmö (SE)