| (84) |
Designated Contracting States: |
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AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE
SI SK TR |
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Designated Extension States: |
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AL BA HR MK YU |
| (30) |
Priority: |
27.02.2005 US 657314 P
26.02.2006 US 364812
|
| (71) |
Applicant: Entegris, Inc. |
|
Chaska, Minnesota 55318 (US) |
|
| (72) |
Inventors: |
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- TIEBEN, Anthony, Mathius
Jordan, Minnesota 55352 (US)
- ANDERSEN, Christian
Carver, Minnesota 55315 (US)
- WISEMAN, Brian
Glencoe, Minnesota 55336 (US)
|
| (74) |
Representative: Geyer, Fehners & Partner |
|
Patentanwälte
Perhamerstraße 31
80687 München
80687 München (DE) |
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