(19)
(11) EP 1 859 076 A1

(12)

(43) Date of publication:
28.11.2007 Bulletin 2007/48

(21) Application number: 06704271.3

(22) Date of filing: 11.01.2006
(51) International Patent Classification (IPC): 
C23C 28/02(2006.01)
(86) International application number:
PCT/EP2006/050160
(87) International publication number:
WO 2006/094845 (14.09.2006 Gazette 2006/37)
(84) Designated Contracting States:
CH DE GB IT LI

(30) Priority: 08.03.2005 EP 05005047

(71) Applicant: SIEMENS AKTIENGESELLSCHAFT
80506 München (DE)

(72) Inventors:
  • KRÜGER, Ursus
    14089 Berlin (DE)
  • STEINBACH, Jan
    13353 Berlin (DE)

   


(54) LAYER SYSTEM WITH DIFFUSION INHIBITING LAYER