(19)
(11) EP 1 861 924 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
26.01.2011 Bulletin 2011/04

(45) Mention of the grant of the patent:
15.12.2010 Bulletin 2010/50

(21) Application number: 06717125.6

(22) Date of filing: 23.03.2006
(51) International Patent Classification (IPC): 
H03H 3/02(2006.01)
C23C 14/22(2006.01)
 H01L 41/24(2006.01)
(86) International application number:
PCT/SE2006/050041
(87) International publication number:
WO 2006/101450 (28.09.2006 Gazette 2006/39)

(54)

PIEZOELECTRIC THIN FILM RESONATOR AND METHOD FOR MAKING SAME

PIEZOELEKTRISCHER DÜNNFILMRESONATOR UND VERFAHREN ZU SEINER HERSTELLUNG

RESONATEUR PIEZO-ELECTRIQUE EN COUCHES MINCES ET PROCEDE DE FABRICATION

(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

(30) Priority: 23.03.2005 SE 0500647

(43) Date of publication of application:
05.12.2007 Bulletin 2007/49

(73) Proprietor: St. Jude Medical Systems AB
751 35 Uppsala (SE)

(72) Inventors:
  • KATARDJIEV, Ilia
    S-756 47 Uppsala (SE)
  • WINGQVIST, Gunilla
    S-756 48 Uppsala (SE)
  • BJURSTRÖM, Johan
    S-752 58 Uppsala (SE)

(74) Representative: Holmberg, Nils Anders Patrik et al
BRANN AB P.O. Box 12246
102 26 Stockholm
102 26 Stockholm (SE)


(56) References cited: : 
US-A- 3 558 351
 US-A- 4 719 383
   
  • RODRIGUEZ-NAVARRO A ET AL: "Development of preferred orientation in polycrystalline AlN thin films deposited by rf sputtering system at low temperature" JOURNAL OF MATERIALS RESEARCH MATER. RES. SOC USA, vol. 12, no. 7, July 1997 (1997-07), pages 1850-1855, XP002545157 ISSN: 0884-2914
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).