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(11)

EP 1 869 692 A1

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(43) Date of publication: 26.12.2007 Bulletin 2007/52 (21) Application number: 06731469.0 (22) Date of filing: 04.04.2006

(51) International Patent Classification (IPC):  H01J 37/32(2006.01) (86) International application number: PCT/JP2006/307522 (87) International publication number: WO 2006/107114 (12.10.2006 Gazette 2006/41)

(84) Designated Contracting States: DE (30) Priority: 05.04.2005 JP 2005108385 (71) Applicant: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. Osaka 571-8501 (JP)	(72) Inventors: ARITA, Kiyoshi c/o Matsushita Electric Industrial Co., Ltd. Chuo-ku, Osaka 540-6207 (JP) NAKAGAWA, Akira c/o Matsushita Electric Industrial Co., Ltd. Chuo-ku, Osaka 540-6207 (JP) (74) Representative: Eisenführ, Speiser & Partner  Patentanwälte Rechtsanwälte Postfach 10 60 78 28060 Bremen 28060 Bremen (DE)