(19)
(11) EP 1 871 605 A1

(12)

(43) Date of publication:
02.01.2008 Bulletin 2008/01

(21) Application number: 05714349.7

(22) Date of filing: 04.04.2005
(51) International Patent Classification (IPC): 
B41J 2/01(2006.01)
G01F 23/22(2006.01)
G01F 23/24(2006.01)
B81B 7/02(2006.01)
(86) International application number:
PCT/AU2005/000480
(87) International publication number:
WO 2006/105570 (12.10.2006 Gazette 2006/41)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR

(71) Applicant: Silverbrook Research Pty. Limited
Balmain, NSW 2041 (AU)

(72) Inventors:
  • SILVERBROOK, Kia, Silverbrook Research PTY LTD
    Balmain, NSW 2041 (AU)
  • NORTH, Angus John, Silverbrook Research PTY LTD
    Balmain, NSW 2041 (AU)
  • MCAVOY, Gregory John, Silverbrook Research PTY LTD
    Balmain, NSW 2041 (AU)
  • MALLINSON, Samuel George, Silverbrook Res. PTY LTD
    Balmain, NSW 2041 (AU)
  • AZIMI, Mehdi, Silverbrook Research PTY LTD
    Balmain, NSW 2041 (AU)
  • REICHL, Paul Justin, Silverbrook Research PTY LTD
    Balmain, NSW 2041 (AU)
  • FISHBURN, Jennifer Mia, Silverbrook Res. PTY LTD
    Balmain, NSW 2041 (AU)

(74) Representative: Moore, Barry et al
Hanna, Moore & Curley 13 Lower Lad Lane
Dublin 2
Dublin 2 (IE)

   


(54) MEMS FLUID SENSOR