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EP 1 872 398 A2

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(88) Date of publication A3: 16.08.2007 (43) Date of publication: 02.01.2008 Bulletin 2008/01 (21) Application number: 06750806.9 (22) Date of filing: 19.04.2006

(51) International Patent Classification (IPC):  H01L 21/66(2006.01) (86) International application number: PCT/US2006/014856 (87) International publication number: WO 2006/115968 (02.11.2006 Gazette 2006/44)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR Designated Extension States: AL BA HR MK YU (30) Priority: 21.04.2005 US 112795 (71) Applicant: Hewlett-Packard Development Company, L.P. Houston, TX 77070 (US)

(72) Inventors: WILLIAMS, R., Stanley Palo Alto, CA 94304 (US) KUEKES, Phillip, J. Palo Alto, CA 94304 (US) PERNER, Frederick, A. Santa Barbara, CA 93109 (US) SNIDER, Gregory, S. Palo Alto, CA 94304 (US) STEWART, Duncan Palo Alto, CA 94304 (US) (74) Representative: Schoppe, Fritz et al Schoppe, Zimmermann, Stöckeler & Zinkler Patentanwälte Postfach 246 D-82043 Pullach bei München D-82043 Pullach bei München (DE)