(19)
(11) EP 1 873 143 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
19.08.2009 Bulletin 2009/34

(45) Mention of the grant of the patent:
15.04.2009 Bulletin 2009/16

(21) Application number: 06013261.0

(22) Date of filing: 27.06.2006
(51) International Patent Classification (IPC): 
C07C 309/17(2006.01)
 H01L 21/027(2006.01)

(54)

A salt suitable for an acid generator and a chemically amplified resist composition containing the same

Salz, welches für einen Säuregenerator geeignet ist, sowie chemisch verstärkte Resistzusammensetzung, die dieses enthält

Sel approprié pour un générateur d'acide et composition de réserve chimiquement amplifiée le contenant

(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

(43) Date of publication of application:
02.01.2008 Bulletin 2008/01

(73) Proprietor: Sumitomo Chemical Company, Limited
Tokyo 104-8260 (JP)

(72) Inventors:
  • Yoshida, Isao
    Ikeda-shi Osaka (JP)
  • Harada, Yukako
    Settu-shi Osaka (JP)
  • Yamaguchi, Satoshi
    Toyonaka-shi Osaka (JP)
  • Ando, Nobuo
    Toyonaka-shi Osaka (JP)

(74) Representative: Vossius & Partner 
Siebertstraße 4
81675 München
81675 München (DE)


(56) References cited: : 
EP-A1- 1 077 391
 JP-A- 2004 004 561
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).