(19)
(11) EP 1 875 295 A1

(12)

(43) Date of publication:
09.01.2008 Bulletin 2008/02

(21) Application number: 05792349.2

(22) Date of filing: 28.09.2005
(51) International Patent Classification (IPC): 
G02B 26/08(2006.01)
(86) International application number:
PCT/EP2005/010500
(87) International publication number:
WO 2006/114127 (02.11.2006 Gazette 2006/44)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

(30) Priority: 27.04.2005 US 675106 P

(71) Applicant: MICRONIC LASER SYSTEMS AB
S-183 03 Täby (SE)

(72) Inventors:
  • LJUNGBLAD, Ulric
    S-431 38 MÖLNDAL (SE)
  • ENOKSSON, Peter
    S-431 69 MÖLNDAL (SE)
  • BRING, Martin
    S-412 60 GÖTEBORG (SE)

   


(54) MEMS DEVICE WITH MUTUALLY PERPENDICULAR DEFLECTABLE REFLECTIVE AND ELECTRODE SURFACES