SUBSTRATE STORAGE CONTAINER AND METHOD OF PRODUCING THE SAME

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EP 1 883 105 B8

(12)	CORRECTED EUROPEAN PATENT SPECIFICATION
	Note: Bibliography reflects the latest situation

(15)	Correction information:
	Corrected version no 1 (W1 B1)

(48)	Corrigendum issued on:
	27.03.2013 Bulletin 2013/13

(45)	Mention of the grant of the patent:
	19.12.2012 Bulletin 2012/51

(21)	Application number: 06732201.6

(22)	Date of filing: 21.04.2006

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International Patent Classification (IPC):

H01L 21/673^(2006.01)

B65D 85/86^(2006.01)

(86)	International application number:
	PCT/JP2006/308393

(87)	International publication number:
	WO 2006/120866 (16.11.2006 Gazette 2006/46)

(54)	SUBSTRATE STORAGE CONTAINER AND METHOD OF PRODUCING THE SAME SUBSTRAT-LAGERBEHÄLTER UND VERFAHREN ZU SEINER HERSTELLUNG CONTENEUR DE STOCKAGE DE SUBSTRAT ET PROCÉDÉ POUR LE PRODUIRE

(84)	Designated Contracting States:
	DE FR GB

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Priority:

06.05.2005 JP 2005134876

(43)	Date of publication of application:
	30.01.2008 Bulletin 2008/05

(73)	Proprietor: Shin-Etsu Polymer Co., Ltd.
	Chiyoda-ku Tokyo 101-0041 (JP)

(72)	Inventor:
	HOSOI, Masato Itoigawa-shi, Niigata 9410007 (JP)

(74)	Representative: Eisenführ, Speiser & Partner
	Postfach 10 60 78 28060 Bremen 28060 Bremen (DE)

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References cited: :

WO-A1-03/041937
JP-A- 2002 353 299
US-A- 6 006 919

JP-A- 2002 299 428
JP-U- 05 026 551

Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).