(19)
(11) EP 1 893 320 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
24.03.2010 Bulletin 2010/12

(45) Mention of the grant of the patent:
09.12.2009 Bulletin 2009/50

(21) Application number: 06753692.0

(22) Date of filing: 17.05.2006
(51) International Patent Classification (IPC): 
B01D 53/32(2006.01)
B01D 53/46(2006.01)
 C01B 35/02(2006.01)
(86) International application number:
PCT/EP2006/004692
(87) International publication number:
WO 2006/122794 (23.11.2006 Gazette 2006/47)

(54)

MATERIALS PURIFICATION BY TREATMENT WITH HYDROGEN-BASED PLASMA

REINIGUNG VON MATERIALIEN DURCH BEHANDLUNG MIT WASSERSTOFFBASIERTEM PLASMA

PURIFICATION DE MATERIAUX PAR TRAITEMENT AU PLASMA A BASE D'HYDROGENE

(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

(30) Priority: 17.05.2005 EP 05010689
18.05.2005 EP 05010789

(43) Date of publication of application:
05.03.2008 Bulletin 2008/10

(73) Proprietor: Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V.
80539 München (DE)

(72) Inventors:
  • ALEKSEEVA, Anastasia
    117461 Moscow (RU)
  • KOVNIR, Kirill
    01187 Dresden (DE)
  • CHIZHOV, Pavel
    117461 Moscow (RU)
  • BAITINGER, Michael
    01187 Dresden (DE)
  • GRIN, Yuri
    01277 Dresden (DE)

(74) Representative: Dey, Michael et al
Weickmann & Weickmann Patentanwälte Postfach 86 08 20
81635 München
81635 München (DE)


(56) References cited: : 
FR-A1- 2 501 529
US-A- 3 723 290
US-A- 3 992 200
 GB-A- 1 106 011
US-A- 3 783 167
US-A- 4 849 164
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).