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(11) | EP 1 906 024 A3 |
| (12) | EUROPEAN PATENT APPLICATION |
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| (54) | Operation control device and method of vacuum pumps |
| (57) An operation control devices and operation methods thereof so as to eliminate the
difficulties in such a case of introduction of vacuum sensors and/or inverter control
is disclosed. The disclosure relates to a control of plural sets of vacuum pumps.
In order to comply with the subjects to overcome the difficulties, the disclosure
proposes to utilize current detection approach instead of direct pressure detection
approach, while showing how to estimate a vacuum degree achieved under the operation
of the pumps as well as presenting a method on the control of the number of pumps.
It is also described how organically a current detecting device, a vacuum degree estimating
device, a working pump control device and related methods to satisfy the subjects
are linked.
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