(19)
(11) EP 1 906 024 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
13.06.2012 Bulletin 2012/24

(43) Date of publication A2:
02.04.2008 Bulletin 2008/14

(21) Application number: 07017322.4

(22) Date of filing: 04.09.2007
(51) International Patent Classification (IPC): 
F04C 28/02(2006.01)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
Designated Extension States:
AL BA HR MK RS

(30) Priority: 12.09.2006 JP 2006247398

(71) Applicant: ANEST IWATA CORPORATION
Yokohama-shi, Kanagawa-ken 223-8501 (JP)

(72) Inventors:
  • Nakayama, Takamitsu
    Yokohama-shi Kanagawa-ken 223-8501 (JP)
  • Satoh, Kazuaki
    Yokohama-shi Kanagawa-ken 223-8501 (JP)

(74) Representative: Strehl Schübel-Hopf & Partner 
Maximilianstrasse 54
80538 München
80538 München (DE)

   


(54) Operation control device and method of vacuum pumps


(57) An operation control devices and operation methods thereof so as to eliminate the difficulties in such a case of introduction of vacuum sensors and/or inverter control is disclosed. The disclosure relates to a control of plural sets of vacuum pumps. In order to comply with the subjects to overcome the difficulties, the disclosure proposes to utilize current detection approach instead of direct pressure detection approach, while showing how to estimate a vacuum degree achieved under the operation of the pumps as well as presenting a method on the control of the number of pumps. It is also described how organically a current detecting device, a vacuum degree estimating device, a working pump control device and related methods to satisfy the subjects are linked.







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