| (84) |
Designated Contracting States: |
|
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE
SI SK TR |
| (30) |
Priority: |
22.08.2005 US 710216 P
|
| (71) |
Applicant: ADVANCED TECHNOLOGY MATERIALS, INC. |
|
Danbury, CT 06810-4169 (US) |
|
| (72) |
Inventors: |
|
- MCMANUS, James, V.
Bethel, CT 06801 (US)
- SAMETH, Jerrold, David
Clifton, NJ 07011 (US)
- DIMEO, Frank, Jr.
Falls Church, VA 22043-1129 (US)
|
| (74) |
Representative: Greaves, Carol Pauline et al |
|
Greaves Brewster LLP
Indigo House
Cheddar Business Park
Wedmore Road
Cheddar, Somerset BS27 3EB
Cheddar, Somerset BS27 3EB (GB) |
|
