(19)
(11) EP 1 932 403 A1

(12)

(43) Date of publication:
18.06.2008 Bulletin 2008/25

(21) Application number: 06805928.6

(22) Date of filing: 28.09.2006
(51) International Patent Classification (IPC): 
H05K 3/10(2006.01)
H05K 3/22(2006.01)
H01L 21/768(2006.01)
 H05K 3/12(2006.01)
H01L 21/288(2006.01)
(86) International application number:
PCT/EP2006/009437
(87) International publication number:
WO 2007/039227 (12.04.2007 Gazette 2007/15)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

(30) Priority: 28.09.2005 WO PCT/EP2005/010486

(71) Applicant: Stichting Dutch Polymer Institute
5612 AB Eindhoven (NL)

(72) Inventors:
  • PERELAER, Jolke
    NL-3583 GC Utrecht (NL)
  • DE GANS, Berend Jan
    45141 Essen (DE)
  • SCHUBERT, Ulrich, S.
    NL-5611 KM Eindhoven (NL)

(74) Representative: Ackermann, Joachim 
Postfach 11 13 26
60048 Frankfurt am Main
60048 Frankfurt am Main (DE)

   


(54) METHOD FOR GENERATION OF METAL SURFACE STRUCTURES AND APPARATUS THEREFOR