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EP 1 934 017 A1

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(43) Date of publication: 25.06.2008 Bulletin 2008/26 (21) Application number: 06798070.6 (22) Date of filing: 12.09.2006

(51) International Patent Classification (IPC):  B24B 37/04(2006.01) H01L 21/304(2006.01) (86) International application number: PCT/JP2006/318459 (87) International publication number: WO 2007/032517 (22.03.2007 Gazette 2007/12)

(84) Designated Contracting States: DE FR (30) Priority: 14.09.2005 JP 2005267155 (71) Applicant: EBARA CORPORATION Ohta-ku, Tokyo 144-8510 (JP)	(72) Inventors: KOBAYASHI, Takuji Tokyo 1448510 (JP) AIZAWA, Hideo Tokyo 1448510 (JP) UMEMOTO, Masao Tokyo 1448510 (JP) SONE, Tadakazu Tokyo 1448510 (JP) TORII, Hiroomi Tokyo 1448510 (JP) TAKAHASHI, Nobuyuki Tokyo 1448510 (JP) TSUZUKI, Takashi Tokyo 1448510 (JP) (74) Representative: Carstens, Dirk Wilhelm  Wagner & Geyer Gewürzmühlstraße 5 D-80538 München D-80538 München (DE)