(19)
(11) EP 1 934 482 A2

(12)

(43) Date of publication:
25.06.2008 Bulletin 2008/26

(21) Application number: 06815874.0

(22) Date of filing: 28.09.2006
(51) International Patent Classification (IPC): 
F04D 29/04(2006.01)
(86) International application number:
PCT/US2006/038197
(87) International publication number:
WO 2007/044260 (19.04.2007 Gazette 2007/16)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
Designated Extension States:
AL BA HR MK RS

(30) Priority: 06.10.2005 US 244744

(71) Applicant: Edwards Vacuum, Inc.
Wilmington, MA 01887 (US)

(72) Inventor:
  • HUNTLEY, Graeme
    Somerset XX TA6 7PH (GB)

(74) Representative: Clark, Charles Robert 
Edwards Limited Manor Royal
Crawley, West Sussex RH10 9LW
Crawley, West Sussex RH10 9LW (GB)

   


(54) PUMP APPARATUS FOR SEMICONDUCTOR PROCESSING