POINT-OF-USE PROCESS CONTROL BLENDER SYSTEMS AND CORRESPONDING METHODS - Patent 1934663

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EP 1 934 663 A1

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(43)	Date of publication:
	25.06.2008 Bulletin 2008/26

(21)	Application number: 06808874.9

(22)	Date of filing: 21.09.2006

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International Patent Classification (IPC):

G05D 11/13^(2006.01)
H01L 21/306^(2006.01)

G05D 21/02^(2006.01)

(86)	International application number:
	PCT/IB2006/002618

(87)	International publication number:
	WO 2007/034304 (29.03.2007 Gazette 2007/13)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

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Priority:

26.09.2005 US 720597 P

(71)	Applicant: L'Air Liquide Société Anonyme à Directoire et Conseil de Surveillance pour l'Etude et l'Exploitation
	75321 Paris (FR)

(72)	Inventor:
	URQUHART, Karl, J. Allen, TX 75002 (US)

(74)	Representative: Conan, Philippe Claude
	L'Air Liquide SA, 75 Quai d'Orsay 75321 Paris Cedex 07 75321 Paris Cedex 07 (FR)

(54)	POINT-OF-USE PROCESS CONTROL BLENDER SYSTEMS AND CORRESPONDING METHODS