SUBSTRATE COATED WITH A LAYERED STRUCTURE COMPRISING A TETRAHEDRAL CARBON COATING

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EP 1 937 873 B8

(12)	CORRECTED EUROPEAN PATENT SPECIFICATION
	Note: Bibliography reflects the latest situation

(15)	Correction information:
	Corrected version no 1 (W1 B1)

(48)	Corrigendum issued on:
	31.10.2018 Bulletin 2018/44

(45)	Mention of the grant of the patent:
	05.09.2018 Bulletin 2018/36

(21)	Application number: 06777754.0

(22)	Date of filing: 13.07.2006

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International Patent Classification (IPC):

C23C 28/04^(2006.01)

C23C 28/00^(2006.01)

(86)	International application number:
	PCT/EP2006/064195

(87)	International publication number:
	WO 2007/020138 (22.02.2007 Gazette 2007/08)

(54)	SUBSTRATE COATED WITH A LAYERED STRUCTURE COMPRISING A TETRAHEDRAL CARBON COATING SUBSTRAT, DAS MIT EINER SCHICHTSTRUKTUR MIT EINER BESCHICHTUNG AUS TETRAEDRISCHEM KOHLENSTOFF BESCHICHTET IST SUBSTRAT REVETU D'UNE STRUCTURE STRATIFIEE COMPRENANT UN REVETEMENT DE CARBONE TETRAEDRIQUE

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

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Priority:

18.08.2005 EP 05107583

(43)	Date of publication of application:
	02.07.2008 Bulletin 2008/27

(73)	Proprietor: Oerlikon Surface Solutions AG, Pfäffikon
	8808 Pfäffikon SZ (CH)

(72)	Inventor:
	DEKEMPENEER, Erik B-2390 Oostmalle (BE)

(74)	Representative: Intellectual Property Services GmbH
	Langfeldstrasse 88 8500 Frauenfeld 8500 Frauenfeld (CH)

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References cited: :

WO-A-00/68455
WO-A-2005/054540
WO-A1-00/66506
US-A- 6 143 142
US-B1- 6 228 471

WO-A-2005/054539
WO-A-2006/021275
WO-A1-2005/014882
US-A1- 2004 074 260

NEERINCK D ET AL: "TRIBOLOGICAL PROPERTIES AND STRUCTURAL INVESTIGATION OF DIAMOND-LIKE NANOCOMPOSITES" LE VIDE: SCIENCE, TECHNIQUE ET APPLICATIONS, SFV, FR, no. 279, January 1996 (1996-01), pages 67-69, XP000602985 ISSN: 1266-0167
GRILL A: "Diamond-like carbon: state of the art" DIAMOND AND RELATED MATERIALS, ELSEVIER SCIENCE PUBLISHERS, AMSTERDAM, NL, vol. 8, no. 2-5, March 1999 (1999-03), pages 428-434, XP004364918 ISSN: 0925-9635
PANDIT A ET AL: "INTERFACIAL TOUGHNESS OF DIAMOND-LIKE NANOCOMPOSITE (DLN) THIN FILMS ON SILICON NITRIDE SUBSTRATES", JOURNAL OF MATERIALS SCIENCE LETTERS, CHAPMAN AND HALL LTD. LONDON, GB, vol. 22, no. 18, 15 September 2003 (2003-09-15), XP001199957, ISSN: 0261-8028, DOI: 10.1023/A:1025406118204

Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).