(19)

(11)

EP 1 938 361 A2

(12)

(88) Date of publication A3: 18.05.2006 (43) Date of publication: 02.07.2008 Bulletin 2008/27 (21) Application number: 05784383.1 (22) Date of filing: 22.09.2005

(51) International Patent Classification (IPC):  H01L 21/02(2006.01) (86) International application number: PCT/IB2005/053126 (87) International publication number: WO 2006/035377 (06.04.2006 Gazette 2006/14)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR (30) Priority: 28.09.2004 US 613998 P 17.11.2004 US 628683 P (71) Applicant: Koninklijke Philips Electronics N.V. 5621 BA Eindhoven (NL)

(72) Inventors: SUN, Hongjiang Briarcliff Manor, NY 10510-8001 (US) LAU, Kaman Briarcliff Manor, NY 10510-8001 (US) MCDONALD, Peggie Briarcliff Manor, NY 10510-8001 (US) BELL, Nancy, E. Briarcliff Manor, NY 10510-8001 (US) NESHEIWAT, Tayel Briarcliff Manor, NY 10510-8001 (US) (74) Representative: White, Andrew Gordon  NXP Semiconductors IP Department Cross Oak Lane GB-Redhill, Surrey RH1 5HA GB-Redhill, Surrey RH1 5HA (GB)