(19)
(11) EP 1 940 587 A2

(12)

(88) Date of publication A3:
04.10.2007

(43) Date of publication:
09.07.2008 Bulletin 2008/28

(21) Application number: 06817260.0

(22) Date of filing: 19.10.2006
(51) International Patent Classification (IPC): 
B24B 9/00(2006.01)
(86) International application number:
PCT/US2006/041166
(87) International publication number:
WO 2007/047996 (26.04.2007 Gazette 2007/17)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

(30) Priority: 19.10.2005 US 728126 P
18.10.2006 US 582711

(71) Applicant: TBW Industries Inc.
Furlong, PA 18925 (US)

(72) Inventor:
  • BENNER, Stephen, J.
    Lansdale, PA 19446 (US)

(74) Representative: Miller, James Lionel Woolverton et al
Kilburn & Strode, 20 Red Lion Street
London WC1R 4PJ
London WC1R 4PJ (GB)

   


(54) APERTURED CONDITIONING BRUSH FOR CHEMICAL MECHANICAL PLANARIZATION SYSTEMS