(19)
(11)
EP 1 946 178 A2
(12)
(43)
Date of publication:
23.07.2008
Bulletin 2008/30
(21)
Application number:
06851805.9
(22)
Date of filing:
31.10.2006
(51)
International Patent Classification (IPC):
G02B
26/08
(2006.01)
(86)
International application number:
PCT/US2006/060399
(87)
International publication number:
WO 2008/054424
(
08.05.2008
Gazette 2008/19)
(84)
Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
Designated Extension States:
AL BA HR MK RS
(30)
Priority:
31.10.2005
US 263795
(71)
Applicant:
Advanced NuMicro Systems, Inc.
San Jose, CA 95129 (US)
(72)
Inventor:
FU, Yee-chung
Fremont, CA 94539 (US)
(74)
Representative:
Pingree, Oliver Norman et al
Williams Powell Staple Court 11 Staple Inn Buildings
London, WC1V 7QH
London, WC1V 7QH (GB)
(54)
MEMS MIRROR WITH PARALLEL SPRINGS AND ARCHED SUPPORT FOR BEAMS