(19)

(11)

EP 1 946 384 A1

(12)

(43) Date of publication: 23.07.2008 Bulletin 2008/30 (21) Application number: 06809563.7 (22) Date of filing: 10.10.2006

(51) International Patent Classification (IPC):  H01L 29/792(2006.01) H01L 29/51(2006.01) H01L 27/115(2006.01) (86) International application number: PCT/IB2006/053724 (87) International publication number: WO 2007/043010 (19.04.2007 Gazette 2007/16)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR (30) Priority: 14.10.2005 EP 05109588 (71) Applicant: NXP B.V. 5656 AG Eindhoven (NL)	(72) Inventors: VAN SCHAIJK, Robertus, T., F. NL-5656 AA Eindhoven (NL) AKIL, Nader NL-5656 AA Eindhoven (NL) SLOTBOOM, Michiel NL-5656 AA Eindhoven (NL) (74) Representative: van der Veer, Johannis Leendert  NXP Semiconductors B.V. IP&L Department High Tech Campus 32 5656 AE Eindhoven 5656 AE Eindhoven (NL)