| (84) |
Designated Contracting States: |
|
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE
SI SK TR |
|
Designated Extension States: |
|
AL BA HR MK RS |
| (30) |
Priority: |
18.11.2005 US 737947 P
18.11.2005 US 738290 P
20.11.2006 US 561659
20.11.2006 US 561735
|
| (71) |
Applicant: KLA-Tencor Technologies Corporation |
|
Milpitas, California 95035 (US) |
|
| (72) |
Inventors: |
|
- KULKARNI, Ashok
San Jose, California 95120 (US)
- DUFFY, Brian
San Jose, California 95120 (US)
- MAAYAH, Kais
Cupertino, California 95014 (US)
- ROUSE, Gordon
Dublin, California 94568 (US)
|
| (74) |
Representative: Brown, Kenneth Richard et al |
|
R.G.C. Jenkins & Co.
26 Caxton Street
London SW1H 0RJ
London SW1H 0RJ (GB) |
|
