(19)
(11) EP 1 955 346 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
21.09.2011 Bulletin 2011/38

(45) Mention of the grant of the patent:
08.06.2011 Bulletin 2011/23

(21) Application number: 05804229.2

(22) Date of filing: 28.11.2005
(51) International Patent Classification (IPC): 
H01H 59/00(2006.01)
 H01H 1/00(2006.01)
(86) International application number:
PCT/CH2005/000703
(87) International publication number:
WO 2007/059635 (31.05.2007 Gazette 2007/22)

(54)

CONTACT CONFIGURATIONS FOR MEMS RELAYS AND MEMS SWITCHES AND METHOD FOR MAKING SAME

KONTAKTKONFIGURATIONEN FÜR MEMS-RELAIS UND MEMS-SCHALTER UND HERSTELLUNGSVERFAHREN DAFÜR

CONFIGURATIONS DE CONTACTS POUR RELAIS MEMS ET COMMUTATEURS MEMS ET LEUR PROCÉDÉ DE FABRICATION

(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

(43) Date of publication of application:
13.08.2008 Bulletin 2008/33

(73) Proprietors:
  • ABB Research Ltd.
    8050 Zürich (CH)
  • Massachusetts Institute of Technology
    Cambridge, MA 02139 (US)

(72) Inventors:
  • WEBER, Alexis, Christian
    Cambridge, MA 02139 (US)
  • SLOCUM, Alexander, H.
    NH 03304 (US)
  • LANG, Jeffrey
    Sudbury, MA 01776 (US)
  • KOTILAINEN, Sami
    CH-5200 Brugg (CH)
  • LI, Jian
    Fremont CA 94539 (US)

(74) Representative: ABB Patent Attorneys 
C/o ABB Schweiz AG Intellectual Property (CH-LC/IP) Brown Boveri Strasse 6
5400 Baden
5400 Baden (CH)


(56) References cited: : 
US-A- 5 638 946
US-B1- 6 587 021
 US-B1- 6 520 778
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).