<?xml version="1.0" encoding="UTF-8"?><!DOCTYPE ep-patent-document PUBLIC "-//EPO//EP PATENT DOCUMENT 1.3//EN" "ep-patent-document-v1-3.dtd"><ep-patent-document id="EP06837698A2" file="06837698.7" lang="en" country="EP" doc-number="1955349" kind="A2" date-publ="20080813" status="n" dtd-version="ep-patent-document-v1-1"><SDOBI lang="en"><B000><eptags><B001EP>ATBECHDEDKESFRGBGRITLILUNLSEMCPTIESILTLVFIROMKCYALTRBGCZEEHUPLSKBAHRISYU........</B001EP><B003EP>*</B003EP><B005EP>X</B005EP><B007EP>DIM360 Ver 2.15 (14 Jul 2008) -  1100000/0 1710000/0</B007EP></eptags></B000><B100><B110>1955349</B110><B130>A2</B130><B140><date>20080813</date></B140><B190>EP</B190></B100><B200><B210>06837698.7</B210><B220><date>20061115</date></B220><B240><B241><date>20080604</date></B241></B240><B250>en</B250><B251EP>en</B251EP><B260>en</B260></B200><B300><B310>741956 P</B310><B320><date>20051202</date></B320><B330><ctry>US</ctry></B330><B310>385215</B310><B320><date>20060320</date></B320><B330><ctry>US</ctry></B330><B310>385136</B310><B320><date>20060320</date></B320><B330><ctry>US</ctry></B330><B310>784390 P</B310><B320><date>20060320</date></B320><B330><ctry>US</ctry></B330><B310>784388 P</B310><B320><date>20060320</date></B320><B330><ctry>US</ctry></B330><B310>784331 P</B310><B320><date>20060320</date></B320><B330><ctry>US</ctry></B330><B310>784500 P</B310><B320><date>20060320</date></B320><B330><ctry>US</ctry></B330><B310>795806 P</B310><B320><date>20060428</date></B320><B330><ctry>US</ctry></B330><B310>799203 P</B310><B320><date>20060509</date></B320><B330><ctry>US</ctry></B330></B300><B400><B405><date>20080813</date><bnum>200833</bnum></B405><B430><date>20080813</date><bnum>200833</bnum></B430></B400><B500><B510EP><classification-ipcr sequence="1"><text>H01J   9/02        20060101AFI20070809BHEP        </text></classification-ipcr><classification-ipcr sequence="2"><text>H01J  37/08        20060101ALI20070809BHEP        </text></classification-ipcr><classification-ipcr sequence="3"><text>H01J  37/28        20060101ALI20070809BHEP        </text></classification-ipcr><classification-ipcr sequence="4"><text>H01J  37/252       20060101ALI20070809BHEP        </text></classification-ipcr><classification-ipcr sequence="5"><text>H01J  37/305       20060101ALI20070809BHEP        </text></classification-ipcr><classification-ipcr sequence="6"><text>H01J  37/317       20060101ALI20070809BHEP        </text></classification-ipcr><classification-ipcr sequence="7"><text>B81B   1/00        20060101ALI20070809BHEP        </text></classification-ipcr><classification-ipcr sequence="8"><text>G01N  23/225       20060101ALI20070809BHEP        </text></classification-ipcr><classification-ipcr sequence="9"><text>G12B  21/02        20060101ALI20070809BHEP        </text></classification-ipcr><classification-ipcr sequence="10"><text>H01J  27/26        20060101ALI20070809BHEP        </text></classification-ipcr></B510EP><B540><B541>de</B541><B542>IONENQUELLEN, SYSTEME UND VERFAHREN</B542><B541>en</B541><B542>ION SOURCES, SYSTEMS AND METHODS</B542><B541>fr</B541><B542>SOURCES D'IONS, SYSTEMES ET PROCEDES</B542></B540></B500><B700><B710><B711><snm>Alis Corporation</snm><iid>07839810</iid><irf>06281PWOEP</irf><adr><str>10 Technology Drive</str><city>Peabody, MA 01960</city><ctry>US</ctry></adr></B711></B710><B720><B721><snm>WARD, Billy, W.</snm><adr><str>36 Little Pond Road</str><city>Merrimac, MA 01860</city><ctry>US</ctry></adr></B721><B721><snm>NOTTE IV, John A.</snm><adr><str>18 Lawndale Circle</str><city>Gloucester, MA 01930</city><ctry>US</ctry></adr></B721><B721><snm>FARKAS III, Louis, S.</snm><adr><str>4 Riverview Road</str><city>Durham, NH 03824</city><ctry>US</ctry></adr></B721><B721><snm>PERCIVAL, Randall G.</snm><adr><str>5 Randy Lane</str><city>Raymond, NH 03077</city><ctry>US</ctry></adr></B721><B721><snm>HILL, Raymond</snm><adr><str>21 Wilson Pond Ln.</str><city>Rowley, MA 01969</city><ctry>US</ctry></adr></B721><B721><snm>MANTZ, Ulrich</snm><adr><str>Riedwiesenweg 21</str><city>89601 Schelklingen</city><ctry>DE</ctry></adr></B721><B721><snm>STEIGERWALD, Michael</snm><adr><str>Am Egelsbach 14</str><city>73463 Westhausen</city><ctry>DE</ctry></adr></B721></B720><B740><B741><snm>Carl Zeiss AG - Patentabteilung</snm><iid>00109951</iid><adr><str>Carl Zeiss AG 
c/o Patentabteilung 
Carl-Zeiss-Straße 22</str><city>D-73447 Oberkochen</city><ctry>DE</ctry></adr></B741></B740></B700><B800><B840><ctry>AT</ctry><ctry>BE</ctry><ctry>BG</ctry><ctry>CH</ctry><ctry>CY</ctry><ctry>CZ</ctry><ctry>DE</ctry><ctry>DK</ctry><ctry>EE</ctry><ctry>ES</ctry><ctry>FI</ctry><ctry>FR</ctry><ctry>GB</ctry><ctry>GR</ctry><ctry>HU</ctry><ctry>IE</ctry><ctry>IS</ctry><ctry>IT</ctry><ctry>LI</ctry><ctry>LT</ctry><ctry>LU</ctry><ctry>LV</ctry><ctry>MC</ctry><ctry>NL</ctry><ctry>PL</ctry><ctry>PT</ctry><ctry>RO</ctry><ctry>SE</ctry><ctry>SI</ctry><ctry>SK</ctry><ctry>TR</ctry></B840><B860><B861><dnum><anum>US2006044388</anum></dnum><date>20061115</date></B861><B862>en</B862></B860><B870><B871><dnum><pnum>WO2007067313</pnum></dnum><date>20070614</date><bnum>200724</bnum></B871></B870><B880><date>20070907</date><bnum>000000</bnum></B880></B800></SDOBI></ep-patent-document>