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(11)

EP 1 955 355 A2

(12)

(88) Date of publication A3: 16.08.2007 (43) Date of publication: 13.08.2008 Bulletin 2008/33 (21) Application number: 06837734.0 (22) Date of filing: 15.11.2006

(51) International Patent Classification (IPC):  H01J 37/28(2006.01) H01J 37/08(2006.01) H01J 37/305(2006.01) B81B 1/00(2006.01) G12B 21/02(2006.01) H01J 9/02(2006.01) H01J 37/252(2006.01) H01J 37/317(2006.01) G01N 23/225(2006.01) H01J 27/26(2006.01) (86) International application number: PCT/US2006/044441 (87) International publication number: WO 2007/067317 (14.06.2007 Gazette 2007/24)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR (30) Priority: 02.12.2005 US 741956 P 20.03.2006 US 385215 20.03.2006 US 385136 20.03.2006 US 784390 P 20.03.2006 US 784388 P 20.03.2006 US 784331 P 20.03.2006 US 784500 P 28.04.2006 US 795806 P 09.05.2006 US 799203 P (71) Applicant: Alis Corporation Peabody, MA 01960 (US)

(72) Inventors: WARD, Billy W. Merrimac, MA 01860 (US) NOTTE IV, John A. Gloucester, MA 01930 (US) FARKAS, Louis S. III Durham, NH 03824 (US) PERCIVAL, Randall G. Raymond, NH 03077 (US) HILL, Raymond Rowley, MA 01969 (US) MARKWORT, Lars 64367 Muehltal (DE) ADERHOLD, Dirk 73492 Schwabsberg (DE) (74) Representative: Carl Zeiss AG - Patentabteilung  Carl Zeiss AG c/o Patentabteilung Carl-Zeiss-Straße 22 D-73447 Oberkochen D-73447 Oberkochen (DE)