(19)

(11)

EP 1 957 688 A2

(12)

(88) Date of publication A3: 24.01.2008 (43) Date of publication: 20.08.2008 Bulletin 2008/34 (21) Application number: 06848792.5 (22) Date of filing: 22.11.2006

(51) International Patent Classification (IPC):  C23C 16/00(2006.01) (86) International application number: PCT/US2006/061201 (87) International publication number: WO 2007/076195 (05.07.2007 Gazette 2007/27)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR Designated Extension States: AL BA HR MK RS (30) Priority: 22.11.2005 DE 102005056326 21.07.2006 US 820042 P (71) Applicant: GENUS, INC. Sunnyvale, CA 94089 (US)	(72) Inventors: DALTON, Jeremie, J. San Jose, CA 95131 (US) DAUELSBERG, Martin 52072 Aachen (DE) DOERING, Kenneth San Jose, CA 95138 (US) KARIM, M., Ziaul San Jose, CA 95121 (US) SEIDEL, Thomas, E. Sunnyvale, CA 94087 (US) STRAUCH, Gerhard, K. 52072 Aachen (DE) (74) Representative: White, Duncan Rohan  Marks & Clerk 90 Long Acre London WC2E 9RA London WC2E 9RA (GB)