MEDIUM PRESSURE PLASMA SYSTEM FOR REMOVAL OF SURFACE LAYERS WITHOUT SUBSTRATE LOSS - Patent 1958232

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EP 1 958 232 A1

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(43)	Date of publication:
	20.08.2008 Bulletin 2008/34

(21)	Application number: 05853311.8

(22)	Date of filing: 07.12.2005

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International Patent Classification (IPC):

H01J 37/32^(2006.01)

(86)	International application number:
	PCT/US2005/044367

(87)	International publication number:
	WO 2007/067177 (14.06.2007 Gazette 2007/24)

(84)	Designated Contracting States:
	DE FR IT

(71)	Applicants:
	Axcelis Technologies, Inc. Beverly, MA 01915 (US) UNIVERSITY OF HOUSTON Houston, TX 77204-2015 (US)

(72)	Inventors:
	WOLFE, John Houston, TX 77096 (US) SRIVASTAVA, Aseem Laurel, Texas 20707 (US) BERRY, Ivan Ellicott, MD 21042 (US) SAKTHIVEL, Palani Odenton, MD 21113 (US)

(74)	Representative: Treeby, Philip David William et al
	R.G.C. Jenkins & Co 26 Caxton Street London SW1H 0RJ London SW1H 0RJ (GB)

(54)	MEDIUM PRESSURE PLASMA SYSTEM FOR REMOVAL OF SURFACE LAYERS WITHOUT SUBSTRATE LOSS