(19)

(11)

EP 1 958 252 A2

(12)

(88) Date of publication A3: 07.09.2007 (43) Date of publication: 20.08.2008 Bulletin 2008/34 (21) Application number: 06848514.3 (22) Date of filing: 29.11.2006

(51) International Patent Classification (IPC):  H01L 21/8247(2006.01) H01L 27/115(2006.01) H01L 21/768(2006.01) H01L 23/522(2006.01) H01L 23/532(2006.01) (86) International application number: PCT/US2006/061351 (87) International publication number: WO 2007/067860 (14.06.2007 Gazette 2007/24)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR (30) Priority: 06.12.2005 US 296022 06.12.2005 US 296235 (71) Applicant: SanDisk Corporation Milpitas, CA 95035 (US)	(72) Inventor: HIGASHITANI, Masaaki Cupertino, CA 95014 (US) (74) Representative: Hitchcock, Esmond Antony  Marks & Clerk 90 Long Acre London WC2E 9RA London WC2E 9RA (GB)