| (84) |
Designated Contracting States: |
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AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL
PT RO SE SI SK TR |
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Designated Extension States: |
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AL BA MK RS |
| (30) |
Priority: |
19.02.2007 JP 2007037309
|
| (71) |
Applicant: Hitachi High-Technologies Corporation |
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Tokyo 105-8717 (JP) |
|
| (72) |
Inventors: |
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- Kambara, Katsuhiro
Hitachinaka-shi
Ibaraki 312-8504 (JP)
- Watari, Shigenori
Hitachinaka-shi
Ibaraki 312-8504 (JP)
- Sugiyama, Hidetoshi
Hitachinaka-shi
Ibaraki 312-8504 (JP)
|
| (74) |
Representative: Strehl, Peter |
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Patentanwälte
Strehl Schübel-Hopf & Partner
Maximilianstrasse 54 80538 München 80538 München (DE) |
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