(19)
(11) EP 1 963 872 A1

(12)

(43) Date of publication:
03.09.2008 Bulletin 2008/36

(21) Application number: 06819717.7

(22) Date of filing: 23.11.2006
(51) International Patent Classification (IPC): 
G01R 27/32(2006.01)
G01R 31/28(2006.01)
(86) International application number:
PCT/EP2006/068838
(87) International publication number:
WO 2007/071519 (28.06.2007 Gazette 2007/26)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

(30) Priority: 21.12.2005 EP 05112641

(71) Applicant: International Business Machines Corporation
Armonk, NY 10504 (US)

(72) Inventors:
  • LUDWIG, Thomas
    71063 Sindelfingen (DE)
  • SCHETTLER, Helmut
    72135 Dettenhausen (DE)
  • WINKEL, Thomas-Michael,
    71101 Schönaich (DE)

(74) Representative: Jauregui Urbahn, Kristian 
IBM Deutschland GmbH Patentwesen u. Urheberrecht Postfach
70569 Stuttgart
70569 Stuttgart (DE)

   


(54) MEASUREMENT ARRANGEMENT FOR DETERMINING THE CHARACTERISTIC LINE PARAMETERS BY MEASURING SCATTERING PARAMETERS