(19)

(11)

EP 1 964 170 A2

(12)

(88) Date of publication A3: 13.03.2008 (43) Date of publication: 03.09.2008 Bulletin 2008/36 (21) Application number: 06849250.3 (22) Date of filing: 15.12.2006

(51) International Patent Classification (IPC):  H01L 21/8247(2006.01) G11C 16/08(2006.01) H01L 21/28(2006.01) H01L 29/788(2006.01) G11C 16/04(2006.01) G11C 8/14(2006.01) H01L 27/115(2006.01) (86) International application number: PCT/US2006/062188 (87) International publication number: WO 2007/081642 (19.07.2007 Gazette 2007/29)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR Designated Extension States: AL BA HR MK RS (30) Priority: 21.12.2005 US 316474 21.12.2005 US 316654 (71) Applicant: Sandisk Corporation Milpitas, CA 95035 (US)	(72) Inventor: HIGASHITANI, Masaaki Cupertino, California 95014 (US) (74) Representative: Hitchcock, Esmond Antony et al Marks & Clerk 90 Long Acre London WC2E 9RA London WC2E 9RA (GB)