AN AUTOMATED STATE ESTIMATION SYSTEM FOR CLUSTER TOOLS AND A METHOD OF OPERATING THE SAME - Patent 1966664

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EP 1 966 664 A1

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(43)	Date of publication:
	10.09.2008 Bulletin 2008/37

(21)	Application number: 06847621.7

(22)	Date of filing: 13.12.2006

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International Patent Classification (IPC):

G05B 19/418^(2006.01)
G06Q 50/00^(2006.01)

G06Q 10/00^(2006.01)

(86)	International application number:
	PCT/US2006/047608

(87)	International publication number:
	WO 2007/078792 (12.07.2007 Gazette 2007/28)

(84)	Designated Contracting States:
	DE GB

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Priority:

30.12.2005 DE 102005063132
10.01.2006 DE 102006001257
26.09.2006 US 535327

(71)	Applicant: ADVANCED MICRO DEVICES, INC.
	Sunnyvale CA 94088-3453 (US)

(72)	Inventors:
	DIERKS, Ulrich 01109 Dresden (DE) SCHUMACHER, Hardy 01987 Schwarzheide (DE)

(74)	Representative: Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät
	Leopoldstrasse 4 80802 München 80802 München (DE)

(54)	AN AUTOMATED STATE ESTIMATION SYSTEM FOR CLUSTER TOOLS AND A METHOD OF OPERATING THE SAME