(19)
(11) EP 1 966 886 A2

(12)

(88) Date of publication A3:
27.09.2007

(43) Date of publication:
10.09.2008 Bulletin 2008/37

(21) Application number: 06842591.7

(22) Date of filing: 18.12.2006
(51) International Patent Classification (IPC): 
H03H 9/02(2006.01)
H03H 3/007(2006.01)
(86) International application number:
PCT/IB2006/054930
(87) International publication number:
WO 2007/072408 (28.06.2007 Gazette 2007/26)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

(30) Priority: 23.12.2005 EP 05112943

(71) Applicant: NXP B.V.
5656 AG Eindhoven (NL)

(72) Inventors:
  • VAN BEEK, Jozef, T., M.
    Surrey RH1 5HA (GB)
  • VAN VELZEN, Bart
    Surrey RH1 5HA (GB)

(74) Representative: White, Andrew Gordon 
NXP Semiconductors Intellectual Property Department Cross Oak Lane
Redhill Surrey RH1 5HA
Redhill Surrey RH1 5HA (GB)

   


(54) A MEMS RESONATOR, A METHOD OF MANUFACTURING THEREOF, AND A MEMS OSCILLATOR